Ultra pure water heating lamp

Sat, 20 Jun 2026 06:20:34 +0800

On a 300mm line, a 15-minute temperature excursion during the photoresist bake is enough to kill a full lot. That’s exactly why we built the ultra-pure water heating lamps for the lithography bay. Out here, thermal uniformity and uptime don’t just matter—they set the yield floor. What matters under the hood The lamp pairs a short-wave infrared (SWIR) emitter inside a quartz envelope to heat ultra-pure water right at the point of use, holding ±0.1°C stability. You get wafer-level temperature uniformity across the substrate, so soft bake and hard bake profiles stay on spec. It’s rated for Class 1–100 cleanrooms, generates zero particles, and shows zero outgassing under continuous operation. Output stays repeatable, with drift under 5% over 5,000+ hours, and the thermal response is fast enough to keep pace with high-cadence track cycles without overshoot. What this translates to on the floor Fewer bake excursions. Tighter critical dimension control. Photoresist profiles that behave lot after lot. You keep the line moving—7×24—without unplanned downtime, no surprise lamp swaps, and maintenance you can schedule. Energy use drops because the lamp heats on demand, not by sitting on a bulk reservoir. Stable thermal budget, less scrap, and a lower cost per wafer follow naturally. What you need to get right Installation means matching the lamp to the track thermal interface, then confirming water conductivity and flow stability. Even a small shift in chemistry can throw off setpoint accuracy. Plan a short commissioning run to dial in the PID for your specific bake chamber geometry. Once you nail that, the process repeats—and repeatability is what keeps the fab running.

Pure on Clear Infrared Heating Lamps

Ultra pure water heating lamp