Sarung kuarza untuk lampu IR fabrikasi

Wed, 03 Jun 2026 10:18:27 +0800

On the fab floor, soft bake and hard bake don’t forgive drift. A 2°C hotspot across the wafer can push line-width excursions that scrap the whole lot. We built the quartz sleeve for fab IR lamps to pull that uncertainty out of the thermal budget. What matters under the hood We spec high-purity quartz for the sleeve because it holds stable transmission in the short- to medium-wave IR band, and its thermal expansion profile keeps geometry locked down through rapid thermal cycling. That gives you wafer-level uniformity within ±0.1°C across the bake surface, so photoresist profiles repeat from lot to lot. It’s cleanroom-compatible for Class 1–100, and the geometry is designed for laminar radiant heating with zero particle generation—no outgassing, no flaking, no contamination. Why it holds up in production In lithography tracks and cure modules, the sleeve settles temperature faster and holds setpoint longer. That lets you cut bake time without hurting film quality, shorten warm-up, and trim energy draw. Performance stays steady over 5,000+ hours, with less than 5% intensity loss, so you spend fewer maintenance windows swapping parts and more time running wafers. Process windows tighten, and the excursions that would otherwise force rework just don’t show up. What you need to get right on install Alignment has to be dead-on to the lamp focal axis. Even a few degrees off creates asymmetric heating and drift in critical dimensions. Match the lamp by connector type, wattage, and envelope length. The sleeve is tough, but quartz doesn’t like mechanical shock—handle it with tooling, not bare hands. When it’s aligned and matched, it acts like a predictable thermal element you can count on shift after shift.

Kuarsa on Clear Infrared Heating Lamps

Sarung kuarza untuk lampu IR fabrikasi